| Name |
Description |
| AccessModeChangeRequest |
|
| AskLoadStatusRequest |
|
| CancelCarrierRequest |
|
| CarrierCompleteReport |
|
| CarrierIDReport |
|
| CarrierInCompleteReport |
|
| CarrierOutCompleteReport |
|
| CarrierOutRequest |
|
| ChamberStatusReport |
|
| ControlJobEndReport |
|
| ControlJobStartReport |
|
| ControlJobsInfoInquery |
|
| ControlJobsInfoInqueryAck |
|
| CreateControlJobRequest |
|
| CreateProcessJobRequest |
|
| CreateSorterControlJobRequest |
|
| CreateSorterProcessJobRequest |
|
| DataCollectionCompleteReport |
|
| LoadCompReport |
|
| ProceedSlotMapRequest |
|
| ProceedWithCarrierRequest |
|
| ProcessJobEndReport |
|
| ProcessJobStartReport |
|
| ProcessedWaferCountReport |
|
| ReadyToLoadReport |
|
| ReadyToUnloadReport |
|
| SlotMapReport |
|
| SorterControlJobEndReport |
|
| SorterControlJobStartReport |
|
| ToolAlarmReport |
|
| ToolInventoryReport |
|
| ToolModeChangeRequest |
|
| UnloadCompleteReport |
|
| WaferEndReport |
|
| WaferStartReport |
|